Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955516 | Single wafer dryer and drying methods | Younes Achkire, Alexander Lerner, Boris Govzman, Boris Fishkin, Michael Sugarman +4 more | 2005-10-18 |
| 6910942 | Semiconductor wafer chemical-mechanical planarization process monitoring and end-point detection method and apparatus | David Dornfeld | 2005-06-28 |
| 6855043 | Carrier head with a modified flexible membrane | Brian J. Brown, Charles C. Garretson, Benjamin A. Bonner, Thomas H. Osterheld, Fred C. Redeker | 2005-02-15 |