Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960521 | Method and apparatus for polishing metal and dielectric substrates | David H. Mai, Kapila Wijekoon, Rajeev Bajaj, Rahul Surana, Yongqi Hu +6 more | 2005-11-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960521 | Method and apparatus for polishing metal and dielectric substrates | David H. Mai, Kapila Wijekoon, Rajeev Bajaj, Rahul Surana, Yongqi Hu +6 more | 2005-11-01 |