Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979248 | Conductive polishing article for electrochemical mechanical polishing | Yongqi Hu, Yan Wang, Alain Duboust, Feng Q. Liu, Rashid Mavliev +2 more | 2005-12-27 |
| 6900135 | Buffer station for wafer backside cleaning and inspection | Yoram Uziel, Raphy Adout | 2005-05-31 |
| 6896776 | Method and apparatus for electro-chemical processing | Wei-Yung Hsu, Liang-Yuh Chen, Ratson Morad, Daniel Carl | 2005-05-24 |
| 6848976 | Chemical mechanical polishing with multiple polishing pads | — | 2005-02-01 |