Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949147 | In situ module for particle removal from solid-state surfaces | David Yogev, Ehud Poles, Amir Wachs | 2005-09-27 |
| 6908567 | Contaminant removal by laser-accelerated fluid | — | 2005-06-21 |
| 6900135 | Buffer station for wafer backside cleaning and inspection | Sasson Somekh, Raphy Adout | 2005-05-31 |
| 6864458 | Iced film substrate cleaning | Amir Widmann, David Yogev | 2005-03-08 |