Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958296 | CVD TiSiN barrier for copper integration | Ling Chen, Christophe Marcadal | 2005-10-25 |
| 6846516 | Multiple precursor cyclical deposition system | Michael Yang, Hui Zhang, Hongbin Fang, Ming Xi | 2005-01-25 |