Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6846516 | Multiple precursor cyclical deposition system | Michael Yang, Hyungsuk Alexander Yoon, Hongbin Fang, Ming Xi | 2005-01-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6846516 | Multiple precursor cyclical deposition system | Michael Yang, Hyungsuk Alexander Yoon, Hongbin Fang, Ming Xi | 2005-01-25 |