Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939801 | Selective deposition of a barrier layer on a dielectric material | Hua Chung, Ling Chen, Vincent Ku, Michael Yang | 2005-09-06 |
| 6919275 | Method of preventing diffusion of copper through a tantalum-comprising barrier layer | Tony P. Chiang, Peijun Ding, Fusen Chen, Barry Chin, Gene Y. Kohara +2 more | 2005-07-19 |
| 6908865 | Method and apparatus for cleaning substrates | Martin Kranz, Srinivas Guggilla, Suraj Rengarajan, Mei Chang, Nitin Khurana +1 more | 2005-06-21 |