Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936842 | Method and apparatus for process monitoring | Michael Anthony Wood, Haojiang Li, Moshe Sarfaty, Kevin Song | 2005-08-30 |
| 6911124 | Method of depositing a TaN seed layer | Xianmin Tang, Praburam Gopalraja, John C. Forster, Jianming Fu, Peijun Ding | 2005-06-28 |
| 6908865 | Method and apparatus for cleaning substrates | Martin Kranz, Srinivas Guggilla, Mei Chang, Gongda Yao, Nitin Khurana +1 more | 2005-06-21 |