Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936842 | Method and apparatus for process monitoring | Suraj Rengarajan, Michael Anthony Wood, Haojiang Li, Kevin Song | 2005-08-30 |
| 6896763 | Method and apparatus for monitoring a process by employing principal component analysis | Lalitha Balasubramhanya, Jed Davidow, Dimitris Lymberopoulos | 2005-05-24 |
| 6888639 | In-situ film thickness measurement using spectral interference at grazing incidence | Andreas Goebel, Sebastien Raoux | 2005-05-03 |
| 6855569 | Current leakage measurement | — | 2005-02-15 |
| 6843881 | Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber | Bok Hoen Kim, Nam Le, Martin Jay Seamons, Ameeta Madhava, Michael P. Nault +2 more | 2005-01-18 |