Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6896763 | Method and apparatus for monitoring a process by employing principal component analysis | Lalitha Balasubramhanya, Moshe Sarfaty, Jed Davidow | 2005-05-24 |
| 6895293 | Fault detection and virtual sensor methods for tool fault monitoring | Terry Reiss | 2005-05-17 |