Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6952656 | Wafer fabrication data acquisition and management systems | Sherry Cordova, Terry Doyle, Natalia Kroupnova, Evgueni Lobovski, Inna Louneva +5 more | 2005-10-04 |
| 6895293 | Fault detection and virtual sensor methods for tool fault monitoring | Dimitris Lymberopoulos | 2005-05-17 |