Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6935466 | Lift pin alignment and operation methods and apparatus | Dmitry Lubomirsky, Sheshraj Tulshibagwale, Avi Tepman | 2005-08-30 |
| 6837978 | Deposition uniformity control for electroplating apparatus, and associated method | H. Peter W. Hey, Yezdi Dordi, Mark Denome | 2005-01-04 |