Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933021 | Method of TiSiN deposition using a chemical vapor deposition (CVD) process | Jing-Pei (Connie) Chou, Chien-Teh Kao, Chiukin Lai, Mei Chang | 2005-08-23 |
| 6905965 | Reactive preclean prior to metallization for sub-quarter micron application | Suchitra Subrahmanyan, Liang-Yuh Chen | 2005-06-14 |