Issued Patents 2003
Showing 26–50 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6608343 | Rough (high surface area) electrode from Ti and TiN, capacitors and semiconductor devices including same | Garo Derderian | 2003-08-19 |
| 6606802 | Cleaning efficiency improvement in a high density plasma process chamber using thermally hot gas | Michael Li, Neal R. Rueger | 2003-08-19 |
| 6602785 | Method of forming a conductive contact on a substrate and method of processing a semiconductor substrate using an ozone treatment | Sujit Sharan, Terry L. Gilton | 2003-08-05 |
| 6602796 | Chemical vapor deposition for smooth metal films | Garo Derderian | 2003-08-05 |
| 6602807 | Use of linear injectors to deposit uniform selective ozone TEOS oxide film by pulsing reactants on and off | William Budge, Christopher W. Hill | 2003-08-05 |
| 6596636 | ALD method to improve surface coverage | Garo Derderian | 2003-07-22 |
| 6596583 | Methods for forming and integrated circuit structures containing ruthenium and tungsten containing layers | Vishnu K. Agarwal, Garo Derderian, Weimin Li, Mark Visokay, Cem Basceri +1 more | 2003-07-22 |
| 6589839 | Dielectric cure for reducing oxygen vacancies | Cem Basceri | 2003-07-08 |
| 6586285 | Plasma enhanced chemical vapor deposition method of forming titanium silicide comprising layers | Cem Basceri, Irina Vasilyeva, Ammar Derraa, Philip Campbell | 2003-07-01 |
| 6586820 | Treatment for film surface to reduce photo footing | Zhiping Yin | 2003-07-01 |
| 6586796 | Capacitor with high dielectric constant materials | Cem Basceri, Sam Yang | 2003-07-01 |
| 6583028 | Methods of forming trench isolation regions | Trung T. Doan | 2003-06-24 |
| 6579756 | DRAM processing methods | Cem Basceri | 2003-06-17 |
| 6573182 | Chemical vapor deposition using organometallic precursors | Pierre C. Fazan | 2003-06-03 |
| 6573199 | Methods of treating dielectric materials with oxygen, and methods of forming capacitor constructions | Trung T. Doan | 2003-06-03 |
| 6570252 | Integrated circuitry | Ravi Iyer | 2003-05-27 |
| 6566147 | Method for controlling deposition of dielectric films | Cem Basceri, Dan Gealy | 2003-05-20 |
| 6559472 | Film composition | Garo Derderian | 2003-05-06 |
| 6555432 | Integrated capacitor bottom electrode for use with conformal dielectric | J. Brett Rolfson | 2003-04-29 |
| 6555471 | Method of making a void-free aluminum film | Ravi Iyer | 2003-04-29 |
| 6554910 | Method for treating residues in semiconductor processing chambers | Sujit Sharan | 2003-04-29 |
| 6541843 | Anti-reflective coatings and methods for forming and using same | Zhiping Yin | 2003-04-01 |
| 6541353 | Atomic layer doping apparatus and method | Trung T. Doan | 2003-04-01 |
| 6534357 | Methods for forming conductive structures and structures regarding same | Cem Basceri | 2003-03-18 |
| 6533894 | RF powered plasma enhanced chemical vapor deposition reactor and methods of effecting plasma enhanced chemical vapor deposition | Sujit Sharan, Paul Smith, Mei Chang | 2003-03-18 |