Issued Patents 2003
Showing 51–60 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6531352 | Methods of forming conductive interconnects | Trung T. Doan, Howard E. Rhodes, Sujit Sharan, Philip J. Ireland, Martin C. Roberts | 2003-03-11 |
| 6531730 | Capacitor compatible with high dielectric constant materials having a low contact resistance layer and the method for forming same | Pierre C. Fazan | 2003-03-11 |
| 6524975 | Combined gate cap or digit line and spacer deposition using HDP | Weimin Li, Sujit Sharan | 2003-02-25 |
| 6524867 | Method for forming platinum-rhodium stack as an oxygen barrier | Haining Yang | 2003-02-25 |
| 6521931 | Self-aligned, magnetoresitive random-access memory (MRAM) structure utilizing a spacer containment scheme | Roger Lee, Dennis Keller, Trung T. Doan, Max Hineman, Ren Earl | 2003-02-18 |
| 6518610 | Rhodium-rich oxygen barriers | Haining Yang, Dan Gealy, Howard E. Rhodes, Mark Visokay | 2003-02-11 |
| 6511896 | Method of etching a substantially amorphous TA2O5 comprising layer | Cem Basceri, Garo Derderian, Mark Visokay, John M. Drynan | 2003-01-28 |
| 6511900 | Boron incorporated diffusion barrier material | Vishnu K. Agarwal | 2003-01-28 |
| 6503851 | Use of linear injectors to deposit uniform selective ozone TEOS oxide film by pulsing reactants on and off | William Budge, Christopher W. Hill | 2003-01-07 |
| 6503842 | Plasmaless dry contact cleaning method using interhalogen compounds | Donald L. Westmoreland | 2003-01-07 |