Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617230 | Use of selective ozone teos oxide to create variable thickness layers and spacers | William Budge, Gurtej S. Sandhu | 2003-09-09 |
| 6602807 | Use of linear injectors to deposit uniform selective ozone TEOS oxide film by pulsing reactants on and off | William Budge, Gurtej S. Sandhu | 2003-08-05 |
| 6503851 | Use of linear injectors to deposit uniform selective ozone TEOS oxide film by pulsing reactants on and off | William Budge, Gurtej S. Sandhu | 2003-01-07 |