Issued Patents 2003
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664171 | Method of alloying a semiconductor device | Fernando Gonzalez, Thomas A. Figura | 2003-12-16 |
| 6599666 | Multi-layer, attenuated phase-shifting mask | — | 2003-07-29 |
| 6594013 | Reflectance method for evaluating the surface characteristics of opaque materials | Randhir P. S. Thakur, Michael Nuttall, Robert Burke | 2003-07-15 |
| 6558854 | Process for forming features on a semiconductor wafer using a phase shifting mask that can be used with two different wavelengths of light | Christophe Pierrat | 2003-05-06 |
| 6555432 | Integrated capacitor bottom electrode for use with conformal dielectric | Gurtej S. Sandhu | 2003-04-29 |
| 6555298 | Method and apparatus for uniformly baking substrates such as photomasks | — | 2003-04-29 |
| 6555896 | Etch stop for use in etching of silicon oxide | David A. Cathey, Valerie A. Ward, Karen M. Winchester | 2003-04-29 |
| 6548223 | Methods of forming patterns across photoresist and methods of forming radiation-patterning tools | — | 2003-04-15 |
| 6521049 | Method for reducing gaseous species of contamination in wet processes | — | 2003-02-18 |
| 6509250 | Method for CMOS well drive in a non-inert ambient | Tyler Lowrey, Fernando Gonzalez, W. Richard Barbour | 2003-01-21 |
| 6506689 | Method for removing contaminants from a semiconductor wafer | — | 2003-01-14 |