Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6586285 | Plasma enhanced chemical vapor deposition method of forming titanium silicide comprising layers | Cem Basceri, Ammar Derraa, Philip Campbell, Gurtej S. Sandhu | 2003-07-01 |