Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665415 | Apparatus and method for controlling ion beam properties using electrostatic filter | Frank Sinclair, Shengwu Chang | 2020-05-26 |
| 10522330 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer +1 more | 2019-12-31 |
| 10504682 | Conductive beam optic containing internal heating element | Shengwu Chang, Frank Sinclair, Christopher Campbell, Robert C. Lindberg, Eric D. Hermanson | 2019-12-10 |
| 10410844 | RF clean system for electrostatic elements | Kevin Anglin, Brant S. Binns, Peter F. Kurunczi, Jay T. Scheuer, Eric D. Hermanson | 2019-09-10 |
| 10290462 | High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture | Bon-Woong Koo, Svetlana B. Radovanov, Anthony Renau | 2019-05-14 |
| 10224181 | Radio frequency extraction system for charge neutralized ion beam | Costel Biloiu, Piotr Lubicki, Tyler Rockwell, Christopher Campbell, Vikram Singh +3 more | 2019-03-05 |
| 10192727 | Electrodynamic mass analysis | Frank Sinclair, Joseph C. Olson, Costel Biloiu, Peter F. Kurunczi | 2019-01-29 |
| 10074514 | Apparatus and method for improved ion beam current | Shengwu Chang, Frank Sinclair, Philip Layne | 2018-09-11 |
| 10068758 | Ion mass separation using RF extraction | — | 2018-09-04 |
| 9988711 | Apparatus and method for multilayer deposition | William Davis Lee, Svetlana B. Radovanov | 2018-06-05 |
| 9922795 | High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture | Bon-Woong Koo, Svetlana B. Radovanov, Anthony Renau | 2018-03-20 |
| 9761410 | Apparatus and method for in-situ cleaning in ion beam apparatus | Jay T. Scheuer, William Davis Lee | 2017-09-12 |
| 9721750 | Controlling contamination particle trajectory from a beam-line electrostatic element | William Davis Lee | 2017-08-01 |
| 9685298 | Apparatus and method for contamination control in ion beam apparatus | Jay T. Scheuer, William Davis Lee | 2017-06-20 |
| 9613777 | Uniformity control using adjustable internal antennas | Svetlana B. Radovanov | 2017-04-04 |
| 9520259 | Ion beam uniformity control | Svetlana B. Radovanov, Bon-Woong Koo | 2016-12-13 |
| 9478399 | Multi-aperture extraction system for angled ion beam | Svetlana B. Radovanov, William Davis Lee | 2016-10-25 |
| 9230773 | Ion beam uniformity control | Svetlana B. Radovanov, Bon-Woong Koo | 2016-01-05 |
| 7744039 | Systems and methods for controlling flows with electrical pulses | Richard Miles, Sergey Macheret, Mikhail Shneider, Joseph S. Silkey | 2010-06-29 |