Issued Patents All Time
Showing 51–74 of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360384 | Method of fabricating and servicing a photomask | Chun-Fu Yang, Pei-Cheng Hsu, Hsin-Chang Lee | 2022-06-14 |
| 11294271 | Mask for extreme ultraviolet photolithography | Wen-Chang Hsueh, Hsin-Chang Lee | 2022-04-05 |
| 11294274 | Pellicle assembly and method for advanced lithography | Amo Chen, Yun-Yue Lin, Hsin-Chang Lee, Chih-Cheng Lin, Jeng-Horng Chen | 2022-04-05 |
| 11249384 | Mask for EUV lithography and method of manufacturing the same | Pei-Cheng Hsu, Chi-Ping Wen, Tzu Yi Wang, Hsin-Chang Lee | 2022-02-15 |
| 11237477 | Reticle container | Pei-Cheng Hsu, Tzu Yi Wang, Hsin-Chang Lee | 2022-02-01 |
| 11221554 | EUV masks to prevent carbon contamination | Pei-Cheng Hsu, Hsin-Chang Lee | 2022-01-11 |
| 11215918 | Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask | Pei-Cheng Hsu, Chun-Fu Yang, Hsin-Chang Lee | 2022-01-04 |
| 11204545 | EUV photo masks and manufacturing method thereof | Pei-Cheng Hsu, Ching-Huang Chen, Hung-Yi Tsai, Ming-Wei Chen, Hsin-Chang Lee | 2021-12-21 |
| 11143954 | Mask patterns and method of manufacture | Wen-Chang Hsueh, Chia-Jen Chen, Hsin-Chang Lee | 2021-10-12 |
| 11119398 | EUV photo masks | Hsin-Chang Lee, Pei-Cheng Hsu, Ping-Hsun Lin, Tzu Yi Wang | 2021-09-14 |
| 11106126 | Method of manufacturing EUV photo masks | Hsin-Chang Lee, Pei-Cheng Hsu, Tzu Yi Wang | 2021-08-31 |
| 11048158 | Method for extreme ultraviolet lithography mask treatment | Pei-Cheng Hsu, Yih-Chen Su, Chi-Kuang Tsai, Tzu Yi Wang, Jong-Yuh Chang +1 more | 2021-06-29 |
| 10534256 | Pellicle assembly and method for advanced lithography | Amo Chen, Yun-Yue Lin, Hsin-Chang Lee, Chih-Cheng Lin, Jeng-Horng Chen | 2020-01-14 |
| 10274819 | EUV pellicle fabrication methods and structures thereof | Pei-Cheng Hsu, Chih-Tsung Shih, Jeng-Horng Chen, Chih-Cheng Lin, Hsin-Chang Lee +2 more | 2019-04-30 |
| 10036951 | Pellicle assembly and fabrication methods thereof | Pei-Cheng Hsu, Chih-Cheng Lin, Hsin-Chang Lee, Anthony Yen | 2018-07-31 |
| 9897910 | Treating a capping layer of a mask | Pei-Cheng Hsu, Chih-Cheng Lin, Wei-Shiuan Chen, Hsin-Chang Lee, Anthony Yen | 2018-02-20 |
| 9857679 | Lithography mask and fabricating the same | Pei-Cheng Hsu, Tzu-Ling Liu | 2018-01-02 |
| 9759997 | Pellicle assembly and method for advanced lithography | Amo Chen, Yun-Yue Lin, Hsin-Chang Lee, Chih-Cheng Lin, Jeng-Horng Chen | 2017-09-12 |
| 9651857 | Mask and method for forming the same | Yun-Yue Lin, Chia-Jen Chen, Hsin-Chang Lee, Anthony Yen | 2017-05-16 |
| 9535317 | Treating a capping layer of a mask | Pei-Cheng Hsu, Chih-Cheng Lin, Wei-Shiuan Chen, Hsin-Chang Lee, Anthony Yen | 2017-01-03 |
| 9341940 | Reticle and method of fabricating the same | Wen-Chang Hsueh, Chia-Jen Chen, Hsin-Chang Lee | 2016-05-17 |
| 8974988 | Mask and method for forming the same | Yun-Yue Lin, Hsin-Chang Lee, Anthony Yen, Chia-Jen Chen | 2015-03-10 |
| 8916482 | Method of making a lithography mask | Hsin-Chang Lee, Yun-Yue Lin, Hung-Chang Hsieh, Chia-Jen Chen, Yih-Chen Su +1 more | 2014-12-23 |
| 8679707 | Method of fabricating a lithography mask | Hsin-Chang Lee, Yun-Yue Lin, Pei-Cheng Hsu, Chia-Jen Chen, Anthony Yen | 2014-03-25 |