Issued Patents All Time
Showing 151–168 of 168 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8046860 | System and method for removing particles in semiconductor manufacturing | Chen-Yuan Hsia, Chang-Cheng Hung, Chi-Lun Lu, Wen-Chuan Wang, Yen-Bin Huang +2 more | 2011-11-01 |
| 7897008 | Apparatus and method for regional plasma control | Chi-Lun Lu | 2011-03-01 |
| 7883601 | Apparatus and method for controlling relative particle speeds in a plasma | Chi-Lun Lu | 2011-02-08 |
| 7819980 | System and method for removing particles in semiconductor manufacturing | Chen-Yuan Hsia, Chang-Cheng Hung, Chi-Lun Lu, Wen-Chuan Wang, Yen-Bin Huang +2 more | 2010-10-26 |
| 7759136 | Critical dimension (CD) control by spectrum metrology | Chang-Cheng Hung, Hung-Chang Hsieh, Wen-Chuan Wang, Chi-Lun Lu, Allen Hsia +1 more | 2010-07-20 |
| 7722997 | Holographic reticle and patterning method | Chung-Hsing Chang, Chih-Cheng Chin, Wen-Chuan Wang, Chi-Lun Lu, Sheng-Chi Chin +1 more | 2010-05-25 |
| 7717063 | Spreading device for feedstuff | Jin Cao | 2010-05-18 |
| 7697114 | Method and apparatus for compensated illumination for advanced lithography | Wen-Chuan Wang, Chih-Cheng Chin, Chi-Lun Lu, Sheng-Chi Chin, Hung-Chang Hsieh | 2010-04-13 |
| 7474788 | Method and system for enhancing image resolution using a modification vector | Wen-Chuan Wang, Jan-Wen You | 2009-01-06 |
| 7460251 | Dimension monitoring method and system | Chen-Yuan Hsia, Wen-Chuan Wang, Chi-Lun Lu, Yen-Bin Huang, Chang-Cheng Hung +4 more | 2008-12-02 |
| 7383530 | System and method for examining mask pattern fidelity | Wen-Chuan Wang, Chih-Cheng Chin, Chi-Lun Lu, Sheng-Chi Chin, Hung-Chang Hsieh | 2008-06-03 |
| 7316872 | Etching bias reduction | Chih-Cheng Chin, Wen-Chuan Wang, Chi-Lun Lu, Sheng-Chi Chin | 2008-01-08 |
| 7312021 | Holographic reticle and patterning method | Chung-Hsing Chang, Chih-Cheng Chin, Wen-Chuan Wang, Chi-Lun Lu, Sheng-Chi Chin +1 more | 2007-12-25 |
| 7060400 | Method to improve photomask critical dimension uniformity and photomask fabrication process | Wen-Chuan Wang, Chih-Chen Chin, Chi-Lun Lu, Sheng-Chi Chin, Hung-Chang Hsieh | 2006-06-13 |
| 7005219 | Defect repair method employing non-defective pattern overlay and photoexposure | Chih-Cheng Chin | 2006-02-28 |
| 6568502 | Sounder, speaker and sound head using the sounder | — | 2003-05-27 |
| 6245656 | Method for producing multi-level contacts | Bi-Ling Chen, Erik S. Jeng | 2001-06-12 |
| 4715004 | Pattern recognition system | Satoshi Kabasawa, Ming-Shiun Hsieh, Chun-Hong Lin | 1987-12-22 |