Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670279 | Method of forming shallow trench isolation with rounded corners and divot-free by using in-situ formed spacers | Chih-Yang Pai, Min-hwa Chi | 2003-12-30 |
| 6565759 | Etching process | Erik S. Jeng, Hao Liu | 2003-05-20 |
| 6476488 | Method for fabricating borderless and self-aligned polysilicon and metal contact landing plugs for multilevel interconnections | Erik S. Jeng, Chien-Sheng Hsieh | 2002-11-05 |
| 6245656 | Method for producing multi-level contacts | Erik S. Jeng, Shih-Ming Chang | 2001-06-12 |
| 6239011 | Method of self-aligned contact hole etching by fluorine-containing discharges | Erik S. Jeng | 2001-05-29 |
| 6184081 | Method of fabricating a capacitor under bit line DRAM structure using contact hole liners | Erik S. Jeng, Wei-Ray Lin, Yu-Chun Ho, Ming-Hong Kuo | 2001-02-06 |
| 6159839 | Method for fabricating borderless and self-aligned polysilicon and metal contact landing plugs for multilevel interconnections | Erik S. Jeng, Chien-Sheng Hsieh | 2000-12-12 |
| 6140240 | Method for eliminating CMP induced microscratches | Fu-Liang Yang, Bih-Tiao Lin, Tzu-Shih Yen, Erik S. Jeng | 2000-10-31 |
| 6103588 | Method of forming a contact hole in a semiconductor device | Erik S. Jeng, Hao Liu | 2000-08-15 |
| 6080662 | Method for forming multi-level contacts using a H-containing fluorocarbon chemistry | Erik S. Jeng, Hao Liu | 2000-06-27 |
| 6074952 | Method for forming multi-level contacts | Hao Liu, Erik S. Jeng, Wan-Yih Lien | 2000-06-13 |
| 6037211 | Method of fabricating contact holes in high density integrated circuits using polysilicon landing plug and self-aligned etching processes | Erik S. Jeng, Yue Chen | 2000-03-14 |
| 6025255 | Two-step etching process for forming self-aligned contacts | Erik S. Jerry, Daniel Lee | 2000-02-15 |
| 5956594 | Method for simultaneously forming capacitor plate and metal contact structures for a high density DRAM device | Fu-Liang Yang, Erik S. Jeng | 1999-09-21 |