Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879135 | Overlay error and process window metrology | Shang-Wei Fang, Jing-Sen Wang, Yuan-Yao Chang, Ting-Hua Hsieh, Pei-Hsuan Lee +1 more | 2020-12-29 |
| 10510623 | Overlay error and process window metrology | Shang-Wei Fang, Jing-Sen Wang, Yuan-Yao Chang, Ting-Hua Hsieh, Pei-Hsuan Lee +1 more | 2019-12-17 |
| 6329241 | Methods for producing capacitor-node contact plugs of dynamic random-access memory | — | 2001-12-11 |
| 6261923 | Method to solve the dishing issue in CMP planarization by using a nitride hard mask for local inverse etchback and CMP | Ming-Hong Kuo, Fu-Liang Yang | 2001-07-17 |
| 6255161 | Method of forming a capacitor and a contact plug | — | 2001-07-03 |
| 6248643 | Method of fabricating a self-aligned contact | Chien-Sheng Hsieh, Fu-Liang Yang, Erik S. Jeng, Bor-Ru Sheu | 2001-06-19 |
| 6187625 | Method of fabricating crown capacitor | Hsien-Wen Liu | 2001-02-13 |
| 6184081 | Method of fabricating a capacitor under bit line DRAM structure using contact hole liners | Erik S. Jeng, Bi-Ling Chen, Yu-Chun Ho, Ming-Hong Kuo | 2001-02-06 |
| 6180489 | Formation of finely controlled shallow trench isolation for ULSI process | Fu-Liang Yang, Bih-Tiao Lin, Erik S. Jeng | 2001-01-30 |
| 6159821 | Methods for shallow trench isolation | Hsu-Li Cheng, Fu-Liang Yang | 2000-12-12 |
| 6143664 | Method of planarizing a structure having an interpoly layer | Liang-Gi Yao, Chung-Ju Lee, Yue Chen, Yeur-Luen Tu | 2000-11-07 |
| 6130128 | Method of fabricating crown capacitor | — | 2000-10-10 |
| 6117740 | Method of forming a shallow trench isolation by using PE-oxide and PE-nitride multi-layer | Li-Yeat Chen | 2000-09-12 |
| 6060348 | Method to fabricate isolation by combining locos and shallow trench isolation for ULSI technology | Fu-Liang Yang, Ming-Hong Kuo, Erik S. Jeng | 2000-05-09 |
| 6057210 | Method of making a shallow trench isolation for ULSI formation via in-direct CMP process | Fu-Liang Yang, Ming-Hong Kuo | 2000-05-02 |
| 6001704 | Method of fabricating a shallow trench isolation by using oxide/oxynitride layers | Hsu-Li Cheng, Erik S. Jeng | 1999-12-14 |