Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879135 | Overlay error and process window metrology | Shang-Wei Fang, Yuan-Yao Chang, Wei-Ray Lin, Ting-Hua Hsieh, Pei-Hsuan Lee +1 more | 2020-12-29 |
| 10605855 | Method, test line and system for detecting semiconductor wafer defects | Yuan-Yao Chang, Hung-Chi Chiu, Chia-Wei Huang | 2020-03-31 |
| 10510623 | Overlay error and process window metrology | Shang-Wei Fang, Yuan-Yao Chang, Wei-Ray Lin, Ting-Hua Hsieh, Pei-Hsuan Lee +1 more | 2019-12-17 |