Issued Patents All Time
Showing 76–100 of 136 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412647 | Via definition scheme | Yen-Cheng Lu, Chih-Tsung Shih, Shinn-Sheng Yu, Anthony Yen | 2016-08-09 |
| 9405195 | Method to define multiple layer patterns with a single exposure by charged particle beam lithography | Yen-Cheng Lu, Chih-Tsung Shih, Shinn-Sheng Yu, Anthony Yen | 2016-08-02 |
| 9377696 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Shinn-Sheng Yu, Anthony Yen | 2016-06-28 |
| 9354507 | Extreme ultraviolet lithography process and mask | Chih-Tsung Shih, Shinn-Sheng Yu, Anthony Yen | 2016-05-31 |
| 9336986 | Electron beam data storage system and method for high volume manufacturing | Hung-Chun Wang, Pei-Shiang Chen, Tzu-Chin Lin, Faruk Krecinic, Wen-Chun Huang +1 more | 2016-05-10 |
| 9316900 | Extreme ultraviolet lithography process and mask | Chih-Tsung Shih, Shinn-Sheng Yu, Anthony Yen | 2016-04-19 |
| 9305799 | Method and system for E-beam lithography with multi-exposure | Pei-Shiang Chen, Hung-Chun Wang | 2016-04-05 |
| 9304390 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Shinn-Sheng Yu, Anthony Yen | 2016-04-05 |
| 9285673 | Assist feature for a photolithographic process | Tao Huang, Chia-Jen Chen, Hsin-Chang Lee, Chih-Tsung Shih, Shinn-Sheng Yu +1 more | 2016-03-15 |
| 9280046 | Method of fabricating mask | Anthony Yen, Chih-Tsung Shih, Ming-Jiun Yao, Yen-Cheng Lu, Shinn-Sheng Yu +1 more | 2016-03-08 |
| 9261774 | Extreme ultraviolet lithography process and mask with reduced shadow effect and enhanced intensity | Yen-Cheng Lu, Shinn-Sheng Yu, Anthony Yen | 2016-02-16 |
| 9256123 | Method of making an extreme ultraviolet pellicle | Chih-Tsung Shih, Tien-Hsi Lee, Chia-Jen Chen, Shang-Chieh Chien, Shinn-Sheng Yu +1 more | 2016-02-09 |
| 9257282 | Method of semiconductor integrated circuit fabrication | Chih-Tsung Shih, Tsung-Min Huang, Chung-Ju Lee, Shinn-Sheng Yu, Anthony Yen | 2016-02-09 |
| 9252048 | Metal and via definition scheme | Yen-Cheng Lu, Chih-Tsung Shih, Shinn-Sheng Yu, Anthony Yen | 2016-02-02 |
| 9244366 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Shinn-Sheng Yu, Anthony Yen | 2016-01-26 |
| 9229326 | Method for integrated circuit patterning | Yen-Cheng Lu, Shu-Hao Chang, Shinn-Sheng Yu, Jui-Ching Wu, Anthony Yen | 2016-01-05 |
| 9195135 | Method for mask fabrication and repair | Yen-Cheng Lu, Shinn-Sheng Yu, Anthony Yen | 2015-11-24 |
| 9182659 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Shinn-Sheng Yu, Anthony Yen | 2015-11-10 |
| 9184054 | Method for integrated circuit patterning | Tsung-Min Huang, Chih-Tsung Shih, Chung-Ju Lee, Chieh-Han Wu, Shinn-Sheng Yu | 2015-11-10 |
| 9159559 | Lithography layer with quenchers to prevent pattern collapse | Shang-Chieh Chien, Shu-Hao Chang, Jui-Ching Wu, Anthony Yen | 2015-10-13 |
| 9146459 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Shinn-Sheng Yu, Anthony Yen | 2015-09-29 |
| 9140987 | Method for lithography patterning | Shang-Chieh Chien, Shu-Hao Chang, Hsiang-Yu Chou, Ming-Chin Chien, Jui-Ching Wu | 2015-09-22 |
| 9134604 | Extreme ultraviolet (EUV) mask and method of fabricating the EUV mask | Chih-Tsung Shih, Hsin-Chieh Yao, Shinn-Sheng Yu, Chung-Ju Lee, Anthony Yen | 2015-09-15 |
| 9122166 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Shinn-Sheng Yu, Anthony Yen | 2015-09-01 |
| 9091947 | Extreme ultraviolet light (EUV) photomasks and fabrication methods thereof | Yen-Cheng Lu, Chih-Tsung Shih, Shinn-Sheng Yu, Anthony Yen | 2015-07-28 |