Issued Patents All Time
Showing 101–117 of 117 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7485949 | Semiconductor device | Chia-Cheng Chou, Zhen-Cheng Wu, Keng-Chu Lin, Shwang-Ming Jeng | 2009-02-03 |
| 7466027 | Interconnect structures with surfaces roughness improving liner and methods for fabricating the same | Keng-Chu Lin, Chia-Cheng Chou | 2008-12-16 |
| 7429542 | UV treatment for low-k dielectric layer in damascene structure | Keng-Chu Lin, Tien-I Bao | 2008-09-30 |
| 7410895 | Methods for forming interconnect structures | Keng-Chu Lin, Yi-Chi Liao | 2008-08-12 |
| 7312531 | Semiconductor device and fabrication method thereof | Hui-Lin Chang, Yung-Cheng Lu, Pi-Tsung Chen, Shau-Lin Shue, Chien-Hsueh Shih +2 more | 2007-12-25 |
| 7250370 | Two step post-deposition treatment of ILD layer for a lower dielectric constant and improved mechanical properties | Hui-Lin Chang, Tien-I Bao, Yun-Chen Lu | 2007-07-31 |
| 7172964 | Method of preventing photoresist poisoning of a low-dielectric-constant insulator | Syun-Ming Jang | 2007-02-06 |
| 6962869 | SiOCH low k surface protection layer formation by CxHy gas plasma treatment | Tien-I Bao, Hsin-Hsien Lu, Lih-Ping Li, Aaron Song, Syun-Ming Jang | 2005-11-08 |
| 6924242 | SiOC properties and its uniformity in bulk for damascene applications | Syun-Ming Jang, Tien-I Bao, Lih-Ping Li, Al-Sen Liu | 2005-08-02 |
| 6908773 | ATR-FTIR metal surface cleanliness monitoring | Lain-Jong Li, Syun-Ming Jang | 2005-06-21 |
| 6867126 | Method to increase cracking threshold for low-k materials | Lih-Ping Li, Yung-Chen Lu | 2005-03-15 |
| 6812043 | Method for forming a carbon doped oxide low-k insulating layer | Tien-I Bao, Lih-Ping Li, Syun-Ming Jang | 2004-11-02 |
| 6806185 | Method for forming low dielectric constant damascene structure while employing a carbon doped silicon oxide capping layer | Lain-Jong Li | 2004-10-19 |
| 6756321 | Method for forming a capping layer over a low-k dielectric with improved adhesion and reduced dielectric constant | Yung-Cheng Lu, Lain-Jong Li, Lih-Ping Li, Yu-Huei Chen, Shu E Ku | 2004-06-29 |
| 6654109 | System for detecting surface defects in semiconductor wafers | Lain-Jong Li, Syun-Ming Jang | 2003-11-25 |
| 6602779 | Method for forming low dielectric constant damascene structure while employing carbon doped silicon oxide planarizing stop layer | Lain-Jong Li, Yung-Cheng Lu | 2003-08-05 |
| 6602780 | Method for protecting sidewalls of etched openings to prevent via poisoning | Tsu Shih, Yung-Cheng Lu, Lih-Ping Li, Tien-I Bao | 2003-08-05 |