YL

Yun-Chen Lu

TSMC: 2 patents #6,667 of 12,232Top 55%
Overall (All Time): #2,089,084 of 4,157,543Top 55%
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Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
8158521 Two step post-deposition treatment of ILD layer for a lower dielectric constant and improved mechanical properties Hui-Lin Chang, Chung-Chi Ko, Tien-I Bao 2012-04-17
7250370 Two step post-deposition treatment of ILD layer for a lower dielectric constant and improved mechanical properties Hui-Lin Chang, Chung-Chi Ko, Tien-I Bao 2007-07-31