Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7897505 | Method for enhancing adhesion between layers in BEOL fabrication | Chung-Chi Ko, Yung-Cheng Lu, Hui-Lin Chang, Chih-Hsien Lin | 2011-03-01 |
| 7456093 | Method for improving a semiconductor device delamination resistance | Pi-Tsung Chen, Keng-Chu Lin, Hui-Lin Chang, Tien-I Bao, Yung-Cheng Lu +1 more | 2008-11-25 |
| 7320945 | Gradient low k material | Syun-Ming Jang | 2008-01-22 |
| 7288284 | Post-cleaning chamber seasoning method | Yung-Chen Lu | 2007-10-30 |
| 7001833 | Method for forming openings in low-k dielectric layers | Tien-J Bao, Syun-Ming Jang | 2006-02-21 |
| 6962869 | SiOCH low k surface protection layer formation by CxHy gas plasma treatment | Tien-I Bao, Hsin-Hsien Lu, Chung-Chi Ko, Aaron Song, Syun-Ming Jang | 2005-11-08 |
| 6958524 | Insulating layer having graded densification | Yung-Cheng Lu | 2005-10-25 |
| 6924242 | SiOC properties and its uniformity in bulk for damascene applications | Syun-Ming Jang, Chung-Chi Ko, Tien-I Bao, Al-Sen Liu | 2005-08-02 |
| 6884659 | Thin interface layer to improve copper etch stop | Bi-Trong Chen, Lain-Jong Li, Syun-Ming Jang, Shu E Ku, Tien-I Bao | 2005-04-26 |
| 6867126 | Method to increase cracking threshold for low-k materials | Yung-Chen Lu, Chung-Chi Ko | 2005-03-15 |
| 6812043 | Method for forming a carbon doped oxide low-k insulating layer | Tien-I Bao, Chung-Chi Ko, Syun-Ming Jang | 2004-11-02 |
| 6770570 | Method of forming a semiconductor device with a substantially uniform density low-k dielectric layer | Hsin-Hsien Lu, Syun-Ming Jang | 2004-08-03 |
| 6756321 | Method for forming a capping layer over a low-k dielectric with improved adhesion and reduced dielectric constant | Chung-Chi Ko, Yung-Cheng Lu, Lain-Jong Li, Yu-Huei Chen, Shu E Ku | 2004-06-29 |
| 6753269 | Method for low k dielectric deposition | Yung-Chen Lu, Syun-Ming Jang | 2004-06-22 |
| 6623654 | Thin interface layer to improve copper etch stop | Bi-Trong Chen, Lain-Jong Li, Syun-Ming Jang, Shu E Ku, Tien-I Bao | 2003-09-23 |
| 6602780 | Method for protecting sidewalls of etched openings to prevent via poisoning | Tsu Shih, Yung-Cheng Lu, Tien-I Bao, Chung-Chi Ko | 2003-08-05 |
| 6426371 | Sol materials | Li-Mei Chen, Chao Wang, Hsin-Hsen Lu | 2002-07-30 |