Issued Patents All Time
Showing 101–125 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9223197 | Lithography and mask for resolution enhancement | Shinn-Sheng Yu, Yen-Cheng Lu | 2015-12-29 |
| 9213232 | Reflective mask and method of making same | Pei-Cheng Hsu, Chih-Tsung Shih, Chia-Jen Chen, Tsiao-Chen Wu, Shinn-Sheng Yu +1 more | 2015-12-15 |
| 9195135 | Method for mask fabrication and repair | Yen-Cheng Lu, Shinn-Sheng Yu, Jeng-Horng Chen | 2015-11-24 |
| 9182659 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Shinn-Sheng Yu, Jeng-Horng Chen | 2015-11-10 |
| 9159559 | Lithography layer with quenchers to prevent pattern collapse | Shang-Chieh Chien, Shu-Hao Chang, Jui-Ching Wu, Jeng-Horng Chen | 2015-10-13 |
| 9146459 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Shinn-Sheng Yu, Jeng-Horng Chen | 2015-09-29 |
| 9134604 | Extreme ultraviolet (EUV) mask and method of fabricating the EUV mask | Chih-Tsung Shih, Hsin-Chieh Yao, Shinn-Sheng Yu, Jeng-Horng Chen, Chung-Ju Lee | 2015-09-15 |
| 9122166 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Shinn-Sheng Yu, Jeng-Horng Chen | 2015-09-01 |
| 9116435 | Extreme ultraviolet lithography mask | Shinn-Sheng Yu, Yen-Cheng Lu | 2015-08-25 |
| 9091947 | Extreme ultraviolet light (EUV) photomasks and fabrication methods thereof | Yen-Cheng Lu, Chih-Tsung Shih, Shinn-Sheng Yu, Jeng-Horng Chen | 2015-07-28 |
| 9081288 | Extreme ultraviolet (EUV) mask, method of fabricating the EUV mask and method of inspecting the EUV mask | Chih-Tsung Shih, Yen-Cheng Lu, Shinn-Sheng Yu, Jeng-Horng Chen | 2015-07-14 |
| 9081312 | Method to define multiple layer patterns with a single exposure by E-beam lithography | Yen-Cheng Lu, Chih-Tsung Shih, Shinn-Sheng Yu, Jeng-Horng Chen | 2015-07-14 |
| 9075313 | Multiple exposures in extreme ultraviolet lithography | Shinn-Sheng Yu, Yen-Cheng Lu | 2015-07-07 |
| 9052595 | Lithography process | Shinn-Sheng Yu | 2015-06-09 |
| 9046781 | Structure and method for reflective-type mask | Chih-Tsung Shih, Shinn-Sheng Yu, Jeng-Horng Chen, Wei Liu, Chia-Chen Chen +1 more | 2015-06-02 |
| 9034569 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Shinn-Sheng Yu, Jeng-Horng Chen | 2015-05-19 |
| 8988652 | Method and apparatus for ultraviolet (UV) patterning with reduced outgassing | Shu-Hao Chang, Tsiao-Chen Wu, Chia-Hao Hsu, Chia-Chen Chen, Ying-Yu Chen +3 more | 2015-03-24 |
| 8974988 | Mask and method for forming the same | Yun-Yue Lin, Ta-Cheng Lien, Hsin-Chang Lee, Chia-Jen Chen | 2015-03-10 |
| 8962222 | Photomask and method for forming the same | Hsin-Chang Lee, Pei-Cheng Hsu, Chia-Jen Chen | 2015-02-24 |
| 8916482 | Method of making a lithography mask | Hsin-Chang Lee, Yun-Yue Lin, Hung-Chang Hsieh, Chia-Jen Chen, Yih-Chen Su +1 more | 2014-12-23 |
| 8877409 | Reflective mask and method of making same | Pei-Cheng Hsu, Chih-Tsung Shih, Chia-Jen Chen, Tsiao-Chen Wu, Shinn-Sheng Yu +1 more | 2014-11-04 |
| 8841047 | Extreme ultraviolet lithography process and mask | Shinn-Sheng Yu, Yen-Cheng Lu | 2014-09-23 |
| 8828625 | Extreme ultraviolet lithography mask and multilayer deposition method for fabricating same | Yen-Cheng Lu, Shinn-Sheng Yu | 2014-09-09 |
| 8791024 | Method to define multiple layer patterns using a single exposure | Yen-Cheng Lu, Chih-Tsung Shih, Shinn-Sheng Yu, Jeng-Horng Chen | 2014-07-29 |
| 8785084 | Method for mask fabrication and repair | Yen-Cheng Lu, Shinn-Sheng Yu | 2014-07-22 |