Issued Patents All Time
Showing 76–83 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7325419 | Method of forming a phosphorus doped optical core using a PECVD process | Hichem M'Saad, Anchuan Wang | 2008-02-05 |
| 7297376 | Method to reduce gas-phase reactions in a PECVD process with silicon and organic precursors to deposit defect-free initial layers | Kang Sub Yim, Kelvin Chan, Nagarajan Rajagopalan, Josephine Ju-Hwei Chang Liu, Yi Zheng +3 more | 2007-11-20 |
| 7105460 | Nitrogen-free dielectric anti-reflective coating and hardmask | Bok Hoen Kim, Sudha Rathi, Christopher Dennis Bencher, Yuxiang Wang, Hichem M'Saad +1 more | 2006-09-12 |
| 7080528 | Method of forming a phosphorus doped optical core using a PECVD process | Hichem M'Saad, Anchuan Wang | 2006-07-25 |
| 7064078 | Techniques for the use of amorphous carbon (APF) for various etch and litho integration scheme | Wei Liu, Jim Zhongyi He, Meihua Shen, Hichem M'Saad, Wendy H. Yeh +1 more | 2006-06-20 |
| 6927178 | Nitrogen-free dielectric anti-reflective coating and hardmask | Bok Hoen Kim, Sudha Rathi, Christopher Dennis Bencher, Yuxiang Wang, Hichem M'Saad +4 more | 2005-08-09 |
| 6853043 | Nitrogen-free antireflective coating for use with photolithographic patterning | Wendy H. Yeh, Christopher Dennis Bencher, Hichem M'Saad, Sudha Rathi | 2005-02-08 |
| 6559074 | Method of forming a silicon nitride layer on a substrate | Steven Chen, Xianzhi Tao, Shulin Wang, Lee Luo, Kegang Huang | 2003-05-06 |