Issued Patents All Time
Showing 126–145 of 145 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6462566 | Sensor element | Martin Schoefthaler, Ralf Schellin, Bernd Maihoefer, Franz Laermer, Harald Emmerich +1 more | 2002-10-08 |
| 6448604 | Integrated adjustable capacitor | Karsten Funk, Detlef Clawin | 2002-09-10 |
| 6443008 | Decoupled multi-disk gyroscope | Karsten Funk, Wilhelm Frey | 2002-09-03 |
| 6214243 | Process for producing a speed of rotation coriolis sensor | Horst Muenzel, Franz Laermer, Michael Offenberg, Andrea Schilp | 2001-04-10 |
| 6187607 | Manufacturing method for micromechanical component | Michael Offenberg, Udo Bischof | 2001-02-13 |
| 6140709 | Bonding pad structure and method for manufacturing the bonding pad structure | Horst Muenzel, Michael Offenberg, Udo Bischof, Eckhard Graf | 2000-10-31 |
| 6122964 | Micromechanical comb structure | Jens Mohaupt | 2000-09-26 |
| 6117701 | Method for manufacturing a rate-of-rotation sensor | Nicholas Ian Buchan, Horst Muenzel, Franz Laermer, Michael Offenberg, Udo Bischof | 2000-09-12 |
| 6106735 | Wafer stack and method of producing sensors | Jurgen Kurle, Kurt Weiblen, Stefan Pinter, Horst Muenzel, Helmut Baumann +2 more | 2000-08-22 |
| 6055858 | Acceleration sensor | Horst Muenzel, Dietrich Schubert, Alexandra Boehringer, Michael Offenberg, Klaus Heyers | 2000-05-02 |
| 5959208 | Acceleration sensor | Horst Muenzel, Dietrich Schubert, Alexandra Boehringer, Michael Offenberg, Klaus Heyers | 1999-09-28 |
| 5937275 | Method of producing acceleration sensors | Horst Munzel, Michael Offenberg, Klaus Heyers, Bernhard Elsner, Helmut Skapa +3 more | 1999-08-10 |
| 5889207 | Micromechanical rate of rotation sensor having ring with drive element and detection element | — | 1999-03-30 |
| 5728936 | Rotary speed sensor | — | 1998-03-17 |
| 5723353 | Process for manufacturing a sensor | Horst Muenzel, Dietrich Schubert, Alexandra Boehringer, Michael Offenberg, Klaus Heyers | 1998-03-03 |
| 5721377 | Angular velocity sensor with built-in limit stops | Juergen Kurle, Kurt Weiblen, Horst Muenzel, Helmut Baumann, Klaus Heyers | 1998-02-24 |
| 5703293 | Rotational rate sensor with two acceleration sensors | Erich Zabler, Joerg Wolf | 1997-12-30 |
| 5631422 | Sensor comprising multilayer substrate | Peter Sulzberger, Michael Offenberg, Bernhard Elsner | 1997-05-20 |
| 5627317 | Acceleration sensor | Michael Offenberg, Wolfgang Buchholtz | 1997-05-06 |
| 5604312 | Rate-of-rotation sensor | — | 1997-02-18 |