Issued Patents All Time
Showing 76–100 of 145 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7403084 | Microelectromechanical resonator structure, and method of designing, operating and using same | Aaron Partridge | 2008-07-22 |
| 7369004 | Microelectromechanical oscillator and method of operating same | Aaron Partridge, Bernhard Boser, Crist Y. Lu, Paul M. Hagelin | 2008-05-06 |
| 7362197 | Temperature compensation for silicon MEMS resonator | Aaron Partridge | 2008-04-22 |
| 7352040 | Microelectromechanical systems having trench isolated contacts, and methods for fabricating same | Aaron Partridge, Silvia Kronmueller | 2008-04-01 |
| 7323952 | Breath-mode ring resonator structure, and method of designing, operating and using same | Zhiyu Pan, Aaron Partridge | 2008-01-29 |
| 7319372 | In-plane mechanically coupled microelectromechanical tuning fork resonators | Zhiyu Pan, Rob Norris Candler, Aaron Partridge, Volker Materna, Gary Yama +1 more | 2008-01-15 |
| 7317233 | Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same | Aaron Partridge, Silvia Kronmueller | 2008-01-08 |
| 7288824 | Microelectromechanical systems, and devices having thin film encapsulated mechanical structures | Aaron Partridge, Silvia Kronmueller | 2007-10-30 |
| 7268646 | Temperature controlled MEMS resonator and method for controlling resonator frequency | Aaron Partridge | 2007-09-11 |
| 7259436 | Micromechanical component and corresponding production method | Michael Offenberg | 2007-08-21 |
| 7227432 | MEMS resonator array structure and method of operating and using same | Aaron Partridge, Zhiyu Pan | 2007-06-05 |
| 7224236 | Frequency and/or phase compensated microelectromechanical oscillator | Aaron Partridge | 2007-05-29 |
| 7221230 | Frequency and/or phase compensated microelectromechanical oscillator | Aaron Partridge | 2007-05-22 |
| 7221241 | Method for adjusting the frequency of a MEMS resonator | Aaron Partridge | 2007-05-22 |
| 7221033 | Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems | Aaron Partridge | 2007-05-22 |
| 7205867 | Microelectromechanical resonator structure, and method of designing, operating and using same | Aaron Partridge | 2007-04-17 |
| 7202761 | Temperature compensation for silicon MEMS resonator | Aaron Partridge | 2007-04-10 |
| 7172917 | Method of making a nanogap for variable capacitive elements, and device having a nanogap | Aaron Partridge, Thomas Kenny | 2007-02-06 |
| 7164973 | Method for determining vehicle velocity | Dietmar Arndt, Dirk Foerstner, Jasim Ahmed | 2007-01-16 |
| 7134337 | Micromechanical rotational rate sensor | Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez +9 more | 2006-11-14 |
| 7115436 | Integrated getter area for wafer level encapsulated microelectromechanical systems | Aaron Partridge | 2006-10-03 |
| 7102467 | Method for adjusting the frequency of a MEMS resonator | Aaron Partridge | 2006-09-05 |
| 7074637 | Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems | Aaron Partridge | 2006-07-11 |
| 7075160 | Microelectromechanical systems and devices having thin film encapsulated mechanical structures | Aaron Partridge, Silvia Kronmueller | 2006-07-11 |
| 7071793 | Temperature compensation for silicon MEMS resonator | Aaron Partridge | 2006-07-04 |