Issued Patents All Time
Showing 101–125 of 145 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7068125 | Temperature controlled MEMS resonator and method for controlling resonator frequency | Aaron Partridge | 2006-06-27 |
| 7063796 | Micromechanical component and method for producing the same | — | 2006-06-20 |
| 7041225 | Micromechanical component and method for producing the same | — | 2006-05-09 |
| 7000980 | Roof component, in particular an inner liner for a vehicle roof, and a method of producing same | Joachim Röder, Frank Niebuhr, Kai Stehning | 2006-02-21 |
| 6995622 | Frequency and/or phase compensated microelectromechanical oscillator | Aaron Partridge | 2006-02-07 |
| 6987432 | Temperature compensation for silicon MEMS resonator | Aaron Partridge | 2006-01-17 |
| 6955975 | Method for joining a silicon plate to a second plate | Frank Reichenbach, Frank Fischer, Ralf Hausner, Frieder Haag, Eckhard Graf | 2005-10-18 |
| 6952041 | Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same | Aaron Partridge, Silvia Kronmueller | 2005-10-04 |
| 6940632 | Micromechanical structure, in particular for an acceleration sensor | Andreas Kipp, Siegbert Goetz | 2005-09-06 |
| 6939809 | Method for release of surface micromachined structures in an epitaxial reactor | Aaron Partridge | 2005-09-06 |
| 6936491 | Method of fabricating microelectromechanical systems and devices having trench isolated contacts | Aaron Partridge, Silvia Kronmueller | 2005-08-30 |
| 6930367 | Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems | Aaron Partridge | 2005-08-16 |
| 6928879 | Episeal pressure sensor and method for making an episeal pressure sensor | Aaron Partridge | 2005-08-16 |
| 6851744 | Roof module for a motor vehicle | Frank Niebuhr, Joachim Röder, Manfred Röhnke | 2005-02-08 |
| 6808953 | Gap tuning for surface micromachined structures in an epitaxial reactor | Aaron Partridge | 2004-10-26 |
| 6762072 | SI wafer-cap wafer bonding method using local laser energy, device produced by the method, and system used in the method | — | 2004-07-13 |
| 6752017 | Rotation speed sensor | Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez +9 more | 2004-06-22 |
| 6725136 | Tire pressure and parameter monitoring system and method using accelerometers | Jean-Pierre Hathout, Aleksandar Kojic, Aaron Partridge, Jasim Ahmed | 2004-04-20 |
| 6705164 | Rotation rate sensor | Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez +9 more | 2004-03-16 |
| 6691571 | Rotational speed sensor | Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez +9 more | 2004-02-17 |
| 6654424 | Method and device for tuning a first oscillator with a second oscillator and rotation rate sensor | Andreas Thomae, Johannes Artzner, Reinhard Neul, Georg Bischopink, Karsten Funk | 2003-11-25 |
| 6571629 | Micromechanical spring structure, in particular, for a rotation rate sensor | Andreas Kipp, Joerg Hauer, Siegbert Geotz | 2003-06-03 |
| 6536282 | Sensor, composed of a multilayer substrate, having a spring element that is delineated out of a semiconductor layer | Andreas Kipp, Joerg Hauer | 2003-03-25 |
| 6524923 | Integrated adjustable capacitor | Karsten Funk, Detlef Clawin | 2003-02-25 |
| 6521965 | Integrated pressure sensor | — | 2003-02-18 |