Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6940632 | Micromechanical structure, in particular for an acceleration sensor | Siegbert Goetz, Markus Lutz | 2005-09-06 |
| 6571629 | Micromechanical spring structure, in particular, for a rotation rate sensor | Joerg Hauer, Siegbert Geotz, Markus Lutz | 2003-06-03 |
| 6536282 | Sensor, composed of a multilayer substrate, having a spring element that is delineated out of a semiconductor layer | Joerg Hauer, Markus Lutz | 2003-03-25 |