Issued Patents All Time
Showing 26–50 of 114 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10899603 | Micromechanical z-inertial sensor | Ralf Boessendoerfer, Jan Waldmann | 2021-01-26 |
| 10845262 | Micromechanical component for a pressure sensor device | — | 2020-11-24 |
| 10836631 | Method for closing off a micromechanical device by laser melting, and micromechanical device having a laser melt closure | Martin Rambach | 2020-11-17 |
| 10807860 | Micromechanical component for a pressure sensor device | — | 2020-10-20 |
| 10752498 | MEMS component having two different internal pressures | Achim Breitling, Eckhard Graf, Jens Frey, Mawuli Ametowobla | 2020-08-25 |
| 10730746 | Method for manufacturing a micromechanical inertial sensor | Martin Rambach | 2020-08-04 |
| 10684185 | Sensor and/or sound detection device and manufacturing method for a sensor and/or sound detection device | Daniel Haug, Holger Hoefer, Michael Knauss, Sebastian Schuler-Watkins | 2020-06-16 |
| 10647568 | Micromechanical component including diaphragm, manufacturing method for such a component and method for operating a pressure sensor | Helmut Grutzeck | 2020-05-12 |
| 10643896 | Method for producing at least one via in a wafer | Heiko Stahl, Markus Kuhnke, Stefan Majoni, Timo Schary | 2020-05-05 |
| 10584029 | Method for producing thin MEMS chips on SOI substrate and micromechanical component | Burkhard Kuhlmann, Holger Hoefer | 2020-03-10 |
| 10556789 | Laser resealing with stress-reducing prestructuring | Frank Reichenbach, Philip Kappe, Mawuli Ametowobla | 2020-02-11 |
| 10555090 | Microphone with encapsulated moving electrode | Vijaye Kumar Rajaraman, Daniel Christoph Meisel, Bernhard Gehl | 2020-02-04 |
| 10384932 | Device including micromechanical components in cavities having different pressures and method for its manufacture | Achim Breitling, Jan-Peter Stadler, Johannes Classen | 2019-08-20 |
| 10246318 | Micromechanical component and production method for a micromechanical component | Helmut Grutzeck | 2019-04-02 |
| 10207366 | Laser reseal including optimized intensity distribution | Alexander Ilin, Mawuli Ametowobla, Philip Kappe | 2019-02-19 |
| 10183861 | Laser reseal including a protective structure | Achim Breitling, Frank Reichenbach, Julia Amthor | 2019-01-22 |
| 10139424 | OMM rotation rate sensor including a drive, without stationary electrodes | Andreas Lassl, Odd-Axel Pruetz | 2018-11-27 |
| 10094725 | Production method for a detection apparatus and detection apparatuses | Timo Lindemann | 2018-10-09 |
| 10060944 | Micromechanical sensor device and corresponding manufacturing method | — | 2018-08-28 |
| 10029911 | Micromechanical component including a diffusion stop channel | Achim Breitling, Frank Reichenbach, Julia Amthor | 2018-07-24 |
| 10023460 | Structures for reducing and avoiding stresses on the seal bottom side during laser reseal | Achim Breitling, Frank Reichenbach, Julia Amthor | 2018-07-17 |
| 10017380 | Combined laser drilling and the plasma etch method for the production of a micromechanical device and a micromechanical device | Jan-Peter Stadler | 2018-07-10 |
| 10017376 | MEMS element including a stress decoupling structure and a component including such a MEMS element | Johannes Classen, Mirko Hattass, Ralf Reichenbach, Antoine Puygranier | 2018-07-10 |
| 10017375 | Structures for reducing and preventing stress and tensions during processing of silicon with the aid of melting by a laser | Frank Reichenbach, Till Schade, Philip Kappe, Alexander Ilin, Mawuli Ametowobla +1 more | 2018-07-10 |
| 10011479 | MEMS structural component including a deflectable diaphragm and a fixed counter-element as well as a method for manufacturing it | Christoph Schelling, Yvonne Bergmann | 2018-07-03 |