Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11975964 | Method for manufacturing a microelectromechanical structure and microelectromechanical structure | Jochen Reinmuth | 2024-05-07 |
| 11940618 | Micromechanical component and method for producing a micromechanical component | Alexander Eberspaecher, Frank Schatz, Janine Riedrich-Moeller, Joerg Muchow, Josip Mihaljevic +2 more | 2024-03-26 |
| 10899603 | Micromechanical z-inertial sensor | Jan Waldmann, Jochen Reinmuth | 2021-01-26 |
| 8695427 | Micromechanical component having a test structure for determining the layer thickness of a spacer layer and method for manufacturing such a test structure | Jochen Reinmuth, Axel Franke, Mirko Hattass | 2014-04-15 |