Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10384932 | Device including micromechanical components in cavities having different pressures and method for its manufacture | Achim Breitling, Jochen Reinmuth, Johannes Classen | 2019-08-20 |
| 10017380 | Combined laser drilling and the plasma etch method for the production of a micromechanical device and a micromechanical device | Jochen Reinmuth | 2018-07-10 |