Issued Patents All Time
Showing 51–75 of 114 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10001374 | Micromechanical sensor and method for manufacturing a micromechanical sensor | Robert Maul | 2018-06-19 |
| 10000375 | Structures and process for preventing a projection of the laser resealing structure beyond the wafer surface | Frank Reichenbach, Jens Frey, Julia Amthor | 2018-06-19 |
| 9988261 | Micromechanical device and method for manufacturing a micromechanical device | Julian Gonska, Kathrin Gutsche | 2018-06-05 |
| 9958348 | Micromechanical pressure sensor device and corresponding manufacturing method | Johannes Classen, Arnd Kaelberer | 2018-05-01 |
| 9919919 | Laser reseal including an additional layer and alloy formation | Jens Frey, Mawuli Ametowobla, Philip Kappe | 2018-03-20 |
| 9909874 | Rotation rate sensor | — | 2018-03-06 |
| 9890035 | Method for manufacturing a micromechanical component | Achim Breitling, Frank Reichenbach, Julia Amthor | 2018-02-13 |
| 9790084 | Micromechanical sensor device | Arnd Kaelberer | 2017-10-17 |
| 9751751 | Micromechanical component and method for manufacturing same | Johannes Classen | 2017-09-05 |
| 9725309 | Micromechanical sensor device and corresponding manufacturing method | Julian Gonska | 2017-08-08 |
| 9709451 | Micromechanical pressure sensor device and corresponding manufacturing method | Arnd Kaelberer, Johannes Classen | 2017-07-18 |
| 9688527 | Micromechanical component and method for producing a micromechanical component | Jens Frey | 2017-06-27 |
| 9670055 | Micromechanical sensor unit and method for manufacturing micromechanical sensor units | Julian Gonska | 2017-06-06 |
| 9650240 | Component including two semiconductor elements, which are bonded to one another via a structured bonding layer, and method for manufacturing a component of this type | Mirko Hattass, Heiko Stahl, Julian Gonska, Johannes Classen | 2017-05-16 |
| 9606141 | Micromechanical sensor device | Jens Frey, Arnd Kaelberer, Johannes Classen | 2017-03-28 |
| 9567205 | Micromechanical sensor device with a getter in an enclosed cavity | Julian Gonska | 2017-02-14 |
| 9567212 | Micromechanical component | Julian Gonska, Kathrin Gutsche, Jens Frey, Heribert Weber | 2017-02-14 |
| 9513476 | Microelectromechanical component and corresponding production method | — | 2016-12-06 |
| 9422152 | Hybridly integrated module having a sealing structure | — | 2016-08-23 |
| 9411154 | Micro-electromechanical reflector and method for manufacturing a micro-electromechanical reflector | — | 2016-08-09 |
| 9409764 | Microelectromechanical component and manufacturing method for microelectromechanical components | — | 2016-08-09 |
| 9406747 | Component in the form of a wafer level package and method for manufacturing same | Heribert Weber, Hartmut Kueppers, Jens Frey, Neil Davies | 2016-08-02 |
| 9372341 | Comb drive including a pivotable mirror element | Hans Artmann, Peter Sudy | 2016-06-21 |
| 9344806 | Component having a micro-mechanical microphone structure and method for producing the component | — | 2016-05-17 |
| 9309107 | Micromechanical system and corresponding manufacturing method | Andreas Scheurle, Christian Bierhoff | 2016-04-12 |