Issued Patents All Time
Showing 76–100 of 114 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9309111 | Micromechanical component and method for producing a micromechanical component | Hans Artmann | 2016-04-12 |
| 9227837 | Sensor and method for manufacturing a sensor | — | 2016-01-05 |
| 9156675 | Micromechanical component and manufacturing method for a micromechanical component | Arnd Kaelberer, Johannes Classen | 2015-10-13 |
| 9159619 | Method for producing an electrical feedthrough in a substrate, and substrate having an electrical feedthrough | Matthias Neubauer, Martin K. Lindemann, Eduard Rije, Michael Baumann | 2015-10-13 |
| 9153523 | ASIC element including a via | Heribert Weber, Hartmut Kueppers, Neil Davies, Jens Frey | 2015-10-06 |
| 9136169 | Method for producing an electrical feedthrough in a substrate, and substrate having an electrical feedthrough | — | 2015-09-15 |
| 9114978 | Method for manufacturing a component having an electrical through-connection | Jens Frey, Yvonne Bergmann | 2015-08-25 |
| 9082831 | Component having a via | Marcus Ahles, Hubert Benzel, Simon Armbruster | 2015-07-14 |
| 9038466 | Micromechanical component and manufacturing method for a micromechanical component | — | 2015-05-26 |
| 9035432 | Component having through-hole plating, and method for its production | Heribert Weber, Timo Schary, Yvonne Bergmann | 2015-05-19 |
| 9034757 | Method for manufacturing a component having an electrical through-connection | Jens Frey, Yvonne Bergmann | 2015-05-19 |
| 8956544 | Method for manufacturing a micromechanical structure, and micromechanical structure | Johannes Classen, Sebastian Guenther, Pia Bustian-Todorov | 2015-02-17 |
| 8952466 | Flexible stop for an acceleration sensor | Johannes Classen, Guenther-Nino-Carlo Ullrich | 2015-02-10 |
| 8928099 | Micromechanical component and method for the manufacture of same | Johannes Classen, Andreas Scheurle | 2015-01-06 |
| 8850891 | Micromechanical component and manufacturing method for a micromechanical component | — | 2014-10-07 |
| 8792153 | Micromechanical component, intermediate product produced by a manufacturing method, and manufacturing method for a micromechanical component | — | 2014-07-29 |
| 8778194 | Component having a through-connection | Yvonne Bergmann | 2014-07-15 |
| 8756996 | Micromechanical system | — | 2014-06-24 |
| 8752431 | Acceleration sensor method for operating an acceleration sensor | Harald Emmerich | 2014-06-17 |
| 8749250 | Micromechanical component and manufacturing method for a micromechanical component | Gary O'Brien | 2014-06-10 |
| 8741774 | Method for producing an electrical feedthrough in a substrate, and a substrate having an electrical feedthrough | Yvonne Bergmann | 2014-06-03 |
| 8695427 | Micromechanical component having a test structure for determining the layer thickness of a spacer layer and method for manufacturing such a test structure | Ralf Boessendoerfer, Axel Franke, Mirko Hattass | 2014-04-15 |
| 8691611 | Method for creating a micromechanical membrane structure and MEMS component | Arnim Hoechst, Brett Diamond | 2014-04-08 |
| 8692339 | Micromechanical component having a rear volume | Michael Saettler, Stefan Weiss, Arnim Hoechst | 2014-04-08 |
| 8679975 | Method for forming trenches in a semiconductor component | Barbara Will, Heribert Weber | 2014-03-25 |