Issued Patents All Time
Showing 1–25 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11402288 | Membrane-based sensor having a plurality of spacers extending from a cap layer | Ando Feyh | 2022-08-02 |
| 10843917 | Micromechanical device having a decoupled micromechanical structure | Steffen Zunft, Bonsang Kim, Ando Feyh, Andrew Graham, Michael Baus +2 more | 2020-11-24 |
| 10717645 | Exposed-die mold package for a sensor and method for encapsulating a sensor that interacts with the environment | Ando Feyh | 2020-07-21 |
| 10571420 | Nanolaminate gas sensor and method of fabricating a nanolaminate gas sensor using atomic layer deposition | Ashwin Samarao | 2020-02-25 |
| 10545108 | Nanostructured gas sensor | Ashwin Samarao, Ando Feyh | 2020-01-28 |
| 10351420 | Membrane for a capacitive MEMS pressure sensor and method of forming a capacitive MEMS pressure sensor | Ando Feyh | 2019-07-16 |
| 10317211 | Robust inertial sensors | Bongsang Kim, Ando Feyh, Andrew Graham, Michael Baus, Ralf Maier +1 more | 2019-06-11 |
| 10224540 | Li-ion battery with alumina coated porous silicon anode | Ashwin Samarao, Ando Feyh | 2019-03-05 |
| 10184910 | Combined pressure and humidity sensor | Gerhard Lammel, Sibylle Waffenschmidt, Ando Feyh, Andrew Graham | 2019-01-22 |
| 10175188 | Trench based capacitive humidity sensor | Ando Feyh, Andrew Graham, Ashwin Samarao, Gary Yama | 2019-01-08 |
| 10173887 | Epi-poly etch stop for out of plane spacer defined electrode | Andrew Graham, Gary Yama | 2019-01-08 |
| 10160632 | System and method for forming a buried lower electrode in conjunction with an encapsulated MEMS device | Andrew Graham, Ando Feyh | 2018-12-25 |
| 10060888 | MEMS gas chromatograph and method of forming a separator column for a MEMS gas chromatograph | Ando Feyh, Bongsang Kim, Jochen Stehle | 2018-08-28 |
| 10036717 | Nanostructured lanthanum oxide humidity sensor | Ashwin Samarao, Ando Feyh | 2018-07-31 |
| 10035699 | Anti-getter: expandable polymer microspheres for MEMS devices | Ashwin Samarao, Ando Feyh | 2018-07-31 |
| 10006810 | Method to modulate the sensitivity of a bolometer via negative interference | Thomas Rocznik, Fabian Purkl, Ando Feyh, Bongsang Kim, Ashwin Samarao +1 more | 2018-06-26 |
| 9945727 | Resistive switching for MEMS devices | Ashwin Samarao, Ando Feyh, Fabian Purkl, Gary Yama | 2018-04-17 |
| 9908771 | Inertial and pressure sensors on single chip | Ando Feyh | 2018-03-06 |
| 9903763 | Titanium nitride for MEMS bolometers | Ashwin Samarao, Ando Feyh, Fabian Purkl, Gary Yama | 2018-02-27 |
| 9863901 | Semiconductor sensor having a suspended structure and method of forming a semiconductor sensor having a suspended structure | Ando Feyh, Ashwin Samarao, Fabian Purkl, Gary Yama | 2018-01-09 |
| 9816865 | System and method for remote temperature measurements in a harsh environment | Ando Feyh, Joel Oudart, Nikhil Ravi | 2017-11-14 |
| 9698281 | CMOS bolometer | Gary Yama, Ando Feyh, Ashwin Samarao, Fabian Purkl | 2017-07-04 |
| 9588073 | Resistive MEMS humidity sensor | Ando Feyh, Andrew Graham, Ashwin Samarao, Gary Yama | 2017-03-07 |
| 9557222 | Portable device with temperature sensing | Ando Feyh, Gary Yama | 2017-01-31 |
| 9511998 | MEMS device having a getter | Ashwin Samarao, Ando Feyh, Gary Yama, Andrew Graham, Bongsang Kim +1 more | 2016-12-06 |