Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12160215 | Method for manufacturing a piezoelectric resonator | Friedjof Heuck, Marcus Pritschow, Markus Kuhnke, Peter Schmollngruber, Ricardo Zamora +3 more | 2024-12-03 |
| 11939215 | Microelectromechanical structure including a functional element situated in a cavity of the microelectromechanical structure | Penny Weir, Markus Kuhnke | 2024-03-26 |
| 11897758 | Electrical contacting and method for producing an electrical contacting | Jochen Reinmuth, Markus Kuhnke, Timo Schary | 2024-02-13 |
| 11405010 | Method for manufacturing a micromechanical layer structure | — | 2022-08-02 |
| 10889491 | Method for producing a micromechanical element | Markus Kuhnke, Heiko Stahl | 2021-01-12 |
| 10643896 | Method for producing at least one via in a wafer | Heiko Stahl, Jochen Reinmuth, Markus Kuhnke, Timo Schary | 2020-05-05 |