Issued Patents All Time
Showing 26–50 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9797846 | Inspection method and template | — | 2017-10-24 |
| 9779913 | Charged particle beam drawing apparatus and drawing data generation method | Shigehiro Hara, Kenichi Yasui, Hiroshi Yamashita, Yasuo Kato, Saori Gomi +4 more | 2017-10-03 |
| 9626755 | Mask inspection apparatus and mask inspection method | Nobutaka Kikuiri, Ikunao Isomura | 2017-04-18 |
| 9542586 | Pattern inspection apparatus and pattern inspection method | Eiji Matsumoto, Nobutaka Kikuiri | 2017-01-10 |
| 9202270 | Pattern inspection apparatus and pattern inspection method | Takafumi Inoue | 2015-12-01 |
| 9177372 | Defect estimation device and method and inspection system and method | Takayuki Abe | 2015-11-03 |
| 9165355 | Inspection method | Manabu Isobe, Hiroteru Akiyama, Makoto Yabe, Takafumi Inoue, Nobutaka Kikuiri | 2015-10-20 |
| 9057711 | Inspection apparatus and method | Takafumi Inoue, Nobutaka Kikuiri | 2015-06-16 |
| 9031313 | Inspection system | Fumio Ozaki | 2015-05-12 |
| 8983113 | Defect estimation device and method and inspection system and method | Takayuki Abe | 2015-03-17 |
| 8903158 | Inspection system and inspection method | Takafumi Inoue | 2014-12-02 |
| 8781212 | Defect estimation device and method and inspection system and method | Takayuki Abe | 2014-07-15 |
| 8737676 | Defect estimation device and method and inspection system and method | Takayuki Abe | 2014-05-27 |
| 8548223 | Inspection system and method | Takafumi Inoue | 2013-10-01 |
| 8355044 | Reticle defect inspection apparatus and reticle defect inspection method | Toshiyuki Watanabe | 2013-01-15 |
| 8078012 | Pattern inspection apparatus and method | Takayuki Abe | 2011-12-13 |
| 8031932 | Pattern inspection apparatus and method | Takayuki Abe | 2011-10-04 |
| 7973918 | Apparatus and method for pattern inspection | Takayuki Abe | 2011-07-05 |
| 7872745 | Pattern inspection apparatus and pattern inspection method | Takayuki Abe, Tomohiro Iijima, Tetsuyuki Arai | 2011-01-18 |
| 7551767 | Pattern inspection apparatus | Kyoji Yamashita, Toshiyuki Watanabe, Ikunao Isomura, Toru Tojo, Yasushi Sanada | 2009-06-23 |
| 7421109 | Pattern inspection apparatus | Kyoji Yamashita, Toshiyuki Watanabe, Ikunao Isomura, Toru Tojo, Yasushi Sanada | 2008-09-02 |
| 7415149 | Pattern inspection apparatus | Kyoji Yamashita, Toshiyuki Watanabe, Ikunao Isomura, Toru Tojo, Yasushi Sanada | 2008-08-19 |
| 7359043 | Pattern inspecting method and pattern inspecting apparatus | Yoshihide Kato, Kazuto Matsuki, Yasushi Sanada, Riki Ogawa, Takuro Nagao | 2008-04-15 |
| 7275006 | Workpiece inspection apparatus assisting device, workpiece inspection method and computer-readable recording media storing program therefor | Yoshitake Tsuji, Yasuko Saito | 2007-09-25 |
| 7209584 | Pattern inspection apparatus | Shinji Sugihara, Kyoji Yamashita, Toshiyuki Watanabe, Kazuhiro Nakashima | 2007-04-24 |