Issued Patents All Time
Showing 51–60 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7068364 | Pattern inspection apparatus | Shinji Sugihara, Mitsuo Tabata, Yasushi Sanada | 2006-06-27 |
| 7020321 | Pattern data converting method and apparatus | Kazuhiro Nakashima | 2006-03-28 |
| 6883160 | Pattern inspection apparatus | Shinji Sugihara, Kyoji Yamashita, Toshiyuki Watanabe, Kazuhiro Nakashima | 2005-04-19 |
| 6285783 | Pattern data generating apparatus and method for inspecting defects in fine patterns in a photomask or semiconductor wafer | Ikunao Isomura | 2001-09-04 |
| 5960106 | Sample inspection apparatus and sample inspection method | Toru Tojo, Mitsuo Tabata, Toshiyuki Watanabe, Eiichi Kobayashi | 1999-09-28 |
| 5744381 | Method of inspecting a pattern formed on a sample for a defect, and an apparatus thereof | Mitsuo Tabata, Toru Tojo, Toshiyuki Watanabe | 1998-04-28 |
| 5577171 | Figure pattern generating apparatus for detecting pattern defects | Tooru Arai, Toshiyuki Watanabe | 1996-11-19 |
| 5475766 | Pattern inspection apparatus with corner rounding of reference pattern data | Toshiyuki Watanabe, Masao Takanashi, Masayuki Hideshima | 1995-12-12 |
| 5404410 | Method and system for generating a bit pattern | Toru Tojo, Kyoji Yamashita, Mitsuo Tabata, Ryoichi Yoshikawa | 1995-04-04 |
| 5379348 | Pattern defects inspection system | Toshiyuki Watanabe, Toru Tojo, Tomohide Watanabe | 1995-01-03 |