Issued Patents All Time
Showing 51–65 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7022611 | Plasma in-situ treatment of chemically amplified resist | Douglas Keil, Wan-Lin Chen, Eric A. Hudson, Mark Wilcoxson, Andrew D. Bailey, III | 2006-04-04 |
| 6972524 | Plasma processing system control | Alexei Marakhtanov, Eric A. Hudson | 2005-12-06 |
| 6969685 | Etching a dielectric layer in an integrated circuit structure having a metal hard mask layer | Siyi Li, Sean S. Kang | 2005-11-29 |
| 6962879 | Method of plasma etching silicon nitride | Helen Zhu, David R. Pirkle, Andrew S. Li | 2005-11-08 |
| 6919278 | Method for etching silicon carbide | Sean S. Kang, Si Yi Li | 2005-07-19 |
| 6909195 | Trench etch process for low-k dielectrics | Siyi Li, David R. Pirkle, Steve Lassig, Sean S. Kang, Vinay Pohray +1 more | 2005-06-21 |
| 6875699 | Method for patterning multilevel interconnects | Stephan Lassig, Vinay Pohray, Si Yi Li, Thomas W. Mountsier, Chiu Chi | 2005-04-05 |
| 6794293 | Trench etch process for low-k dielectrics | Siyi Li, David R. Pirkle, Steve Lassig, Sean S. Kang, Vinay Pohray +1 more | 2004-09-21 |
| 6670278 | Method of plasma etching of silicon carbide | Si Yi Li, Helen Zhu, David R. Pirkle, James R. Bowers, Michael Goss | 2003-12-30 |
| 6495470 | Contact and via fabrication technologies | Mansour Moinpour, Te Hua Lin, Farhad Moghadam | 2002-12-17 |
| 5883436 | Contact and via fabrication technologies | Mansour Moinpour, Te Hua Lin, Farhad Moghadam | 1999-03-16 |
| 5705419 | Controllable isotropic plasma etching technique for the suppression of stringers in memory cells | Jeffrey Robert Perry, Kristen Luttinger | 1998-01-06 |
| 5427967 | Technique for making memory cells in a way which suppresses electrically conductive stringers | Jeffrey Robert Perry | 1995-06-27 |
| 5383018 | Apparatus and method for calibration of patterned wafer scanners | — | 1995-01-17 |
| 5342801 | Controllable isotropic plasma etching technique for the suppression of stringers in memory cells | Jeffrey Robert Perry, Kristen Luttinger | 1994-08-30 |