Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962879 | Method of plasma etching silicon nitride | Helen Zhu, David R. Pirkle, S. M. Reza Sadjadi | 2005-11-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962879 | Method of plasma etching silicon nitride | Helen Zhu, David R. Pirkle, S. M. Reza Sadjadi | 2005-11-08 |