Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9087176 | Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control | Wei Chang, Krishna Rao, Joseph Gutierrez, Ramon Olavarria, Craig MacNaughton +2 more | 2015-07-21 |
| 9052190 | Bright-field differential interference contrast system with scanning beams of round and elliptical cross-sections | Ali Salehpour, Kurt L. Haller, Pradeep Vukkadala, George Kren, Jiayao Zhang +1 more | 2015-06-09 |
| 9031810 | Methods and systems of object based metrology for advanced wafer surface nanotopography | Haiguang Chen, Sergey Kamensky | 2015-05-12 |
| 9029810 | Using wafer geometry to improve scanner correction effectiveness for overlay control | Craig MacNaughton, Sathish Veeraraghavan, Pradeep Vukkadala, Amir Azordegan | 2015-05-12 |
| 8768665 | Site based quantification of substrate topography and its relation to lithography defocus and overlay | Sathish Veeraraghavan | 2014-07-01 |
| 8630479 | Methods and systems for improved localized feature quantification in surface metrology tools | Haiguang Chen, Shouhong Tang, John Hager, Andrew Zeng, Sergey Kamensky | 2014-01-14 |
| 8594975 | Systems and methods for wafer edge feature detection and quantification | Haiguang Chen | 2013-11-26 |
| 8065109 | Localized substrate geometry characterization | Sathish Veeraraghavan, Rabi Fettig | 2011-11-22 |
| 7853429 | Curvature-based edge bump quantification | Rabi Fettig | 2010-12-14 |
| 7629798 | Wafer edge-defect detection and capacitive probe therefor | Roy E. Mallory, Stephen MacLeod | 2009-12-08 |
| 7324917 | Method, system, and software for evaluating characteristics of a surface with reference to its edge | Chris L. Koliopoulos, Delvin A. Lindley, John F. Valley, Noel S. Poduje | 2008-01-29 |
| 7175214 | Wafer gripping fingers to minimize distortion | Domenico Tortola, Noel S. Poduje | 2007-02-13 |
| 7136519 | Specimen topography reconstruction | Alexander Belyaev | 2006-11-14 |
| 6954269 | Ring chuck to hold 200 and 300 mm wafer | Christopher Gaal | 2005-10-11 |
| 6594002 | Wafer shape accuracy using symmetric and asymmetric instrument error signatures | William Drohan, William Goldfarb, Peter Harvey | 2003-07-15 |
| 6538733 | Ring chuck to hold 200 and 300 mm wafer | Christopher Gaal | 2003-03-25 |