| 7629798 |
Wafer edge-defect detection and capacitive probe therefor |
Jaydeep Sinha, Stephen MacLeod |
2009-12-08 |
| 7114399 |
Shaped non-contact capacitive displacement sensors for measuring shaped targets |
— |
2006-10-03 |
| 6714023 |
Method for high-accuracy non-contact capacitive displacement measurement of poorly connected targets |
— |
2004-03-30 |
| 6560555 |
Method for facilitating the field replacement of sensors |
— |
2003-05-06 |
| 6556941 |
Separation of periodic and non-periodic signal components |
Neil Judell |
2003-04-29 |
| 6476621 |
Self-bootstrapping transducer interface |
— |
2002-11-05 |
| 6400162 |
Capacitive displacement sensor for measuring thin targets |
Richard Carter |
2002-06-04 |
| 6181142 |
Nonlinear current mirror for loop-gain control |
— |
2001-01-30 |
| 5786698 |
Transducer Bootstrapping apparatus |
— |
1998-07-28 |
| 5708368 |
Method and apparatus for emulation of a linear variable differential transducer by a capacitive gaging system |
— |
1998-01-13 |
| 5642298 |
Wafer testing and self-calibration system |
Peter L. Domenicali, Noel S. Poduje, Alexander Belyaev, Peter A. Harvey, Richard Scott Smith |
1997-06-24 |
| 4958129 |
Prealigner probe |
Noel S. Poduje |
1990-09-18 |
| 4646009 |
Contacts for conductivity-type sensors |
— |
1987-02-24 |
| 4457664 |
Wafer alignment station |
Neil Judell, Robert C. Abbe, Noel S. Poduje |
1984-07-03 |