Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7184149 | Methods and apparatus for reducing error in interferometric imaging measurements | Gary J. Swanson, Lyle Shirley, William J. Hubbard | 2007-02-27 |
| 6255664 | Sensor for measuring degree of flatness | Shinji Okawa | 2001-07-03 |
| 5511005 | Wafer handling and processing system | Noel S. Poduje, Randal K. Goodall, Peter L. Domenicali | 1996-04-23 |
| 4910453 | Multi-probe grouping system with nonlinear error correction | Noel S. Poduje | 1990-03-20 |
| 4897015 | Rotary to linear motion robot arm | David G. Baker | 1990-01-30 |
| 4860229 | Wafer flatness station | Noel S. Poduje, Neil Judell | 1989-08-22 |
| 4849916 | Improved spatial resolution measurement system and method | Neil Judell, Noel S. Poduje | 1989-07-18 |
| 4457664 | Wafer alignment station | Neil Judell, Noel S. Poduje, Roy E. Mallory | 1984-07-03 |
| 4353029 | Self inverting gauging system | Noel S. Poduje | 1982-10-05 |
| 4228392 | Second order correction in linearized proximity probe | Noel S. Poduje, Daniel Klein | 1980-10-14 |
| 4217542 | Self inverting gauging system | Noel S. Poduje | 1980-08-12 |