| 7184149 |
Methods and apparatus for reducing error in interferometric imaging measurements |
Gary J. Swanson, Lyle Shirley, William J. Hubbard |
2007-02-27 |
| 6255664 |
Sensor for measuring degree of flatness |
Shinji Okawa |
2001-07-03 |
| 5511005 |
Wafer handling and processing system |
Noel S. Poduje, Randal K. Goodall, Peter L. Domenicali |
1996-04-23 |
| 4910453 |
Multi-probe grouping system with nonlinear error correction |
Noel S. Poduje |
1990-03-20 |
| 4897015 |
Rotary to linear motion robot arm |
David G. Baker |
1990-01-30 |
| 4860229 |
Wafer flatness station |
Noel S. Poduje, Neil Judell |
1989-08-22 |
| 4849916 |
Improved spatial resolution measurement system and method |
Neil Judell, Noel S. Poduje |
1989-07-18 |
| 4457664 |
Wafer alignment station |
Neil Judell, Noel S. Poduje, Roy E. Mallory |
1984-07-03 |
| 4353029 |
Self inverting gauging system |
Noel S. Poduje |
1982-10-05 |
| 4228392 |
Second order correction in linearized proximity probe |
Noel S. Poduje, Daniel Klein |
1980-10-14 |
| 4217542 |
Self inverting gauging system |
Noel S. Poduje |
1980-08-12 |