Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142476 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tomoki IMAMURA, Kazuyuki Okuda, Yasuhiro Inokuchi, Norikazu Mizuno | 2024-11-12 |
| 11705325 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tomoki IMAMURA, Kazuyuki Okuda, Yasuhiro Inokuchi, Norikazu Mizuno | 2023-07-18 |
| 11527401 | Method of processing substate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tomoki IMAMURA, Kazuyuki Okuda, Yasuhiro Inokuchi, Norikazu Mizuno | 2022-12-13 |
| 9963785 | Substrate processing apparatus and semiconductor device manufacturing method | Koichi Honda, Mamoru Umemoto, Kazuyuki Okuda | 2018-05-08 |
| 9895727 | Method of manufacturing semiconductor device, method of cleaning interior of process chamber, substrate processing apparatus, and recording medium | Yoshinobu Nakamura, Masayoshi Minami, Kazuyuki Okuda, Yuji Urano | 2018-02-20 |
| 9593422 | Substrate processing apparatus and semiconductor device manufacturing method | Koichi Honda, Mamoru Umemoto, Kazuyuki Okuda | 2017-03-14 |
| 9545736 | Mold and die metallic material, air-permeable member for mold and die use, and method for manufacturing the same | Mineo Suzuki, Tetsu Yabuno | 2017-01-17 |
| 9502233 | Method for manufacturing semiconductor device, method for processing substrate, substrate processing device and recording medium | Atsushi Sano, Masahiro Yonebayashi | 2016-11-22 |
| 9175395 | Substrate processing apparatus and semiconductor device manufacturing method | Koichi Honda, Mamoru Umemoto, Kazuyuki Okuda | 2015-11-03 |
| 9145606 | Method of manufacturing semiconductor device, cleaning method, substrate processing apparatus and non-transitory computer-readable recording medium | — | 2015-09-29 |
| 8535479 | Manufacturing method of semiconductor device, and semiconductor device | Norikazu Mizuno, Kenji Kanayama, Kazuyuki Okuda, Yoshiro Hirose | 2013-09-17 |
| 8227346 | Method of producing semiconductor device | Hironobu Miya, Kazuyuki Toyoda, Norikazu Mizuno, Taketoshi Sato, Masanori Sakai +2 more | 2012-07-24 |
| 8168549 | Method of manufacturing semiconductor device and substrate processing apparatus | — | 2012-05-01 |
| 8129443 | Polymerizable composition, cured object obtained therefrom, and composite material | Tatsuya Ori, Yasukazu Saimi | 2012-03-06 |
| 8105957 | Method of producing semiconductor device | Hironobu Miya, Kazuyuki Toyoda, Taketoshi Sato, Norikazu Mizuno, Masanori Sakai +2 more | 2012-01-31 |
| 8093159 | Manufacturing method of semiconductor device, and semiconductor device | Norikazu Mizuno, Kenji Kanayama, Kazuyuki Okuda, Yoshiro Hirose | 2012-01-10 |
| 8058184 | Semiconductor device producing method | Hironobu Miya, Norikazu Mizuno | 2011-11-15 |
| 8039404 | Production method for semiconductor device | Hironobu Miya, Kazuyuki Toyoda, Norikazu Mizuno, Taketoshi Sato, Masanori Sakai +2 more | 2011-10-18 |
| 7796397 | Electronic components assembly and method for producing same | Hideaki Yamauchi, Shuusaku Yamamoto, Takashi Sakaguchi, Takashi Yamamoto | 2010-09-14 |
| 7779785 | Production method for semiconductor device and substrate processing apparatus | Hironobu Miya, Kazuyuki Toyoda, Norikazu Mizuno, Taketoshi Sato, Masanori Sakai +2 more | 2010-08-24 |
| 7767594 | Semiconductor device producing method | Hironobu Miya, Norikazu Mizuno | 2010-08-03 |
| 7531467 | Manufacturing method of semiconductor device and substrate processing apparatus | Atsushi Sano, Sadayoshi Horii, Hideharu Itatani | 2009-05-12 |
| 7524766 | Method for manufacturing semiconductor device and substrate processing apparatus | Hideharu Itatani, Sadayoshi Horii, Atsushi Sano | 2009-04-28 |
| 6884738 | Manufacturing method of semiconductor device and substrate processing apparatus | Kanako Kitayama | 2005-04-26 |
| 6825126 | Manufacturing method of semiconductor device and substrate processing apparatus | Sadayoshi Horii, Kanako Kitayama, Masayuki Tsuneda | 2004-11-30 |