Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8872123 | Method of timing laser beam pulses to regulate extreme ultraviolet light dosing | James H. Crouch, Matthew R. Graham, Andrew Liu | 2014-10-28 |
| 8102889 | Multi-chamber gas discharge laser bandwidth control through discharge timing | William N. Partlo, Daniel J. W. Brown | 2012-01-24 |
| 8098698 | Active spectral control of DUV laser light source | Wayne J. Dunstan | 2012-01-17 |
| RE42588 | Control system for a two chamber gas discharge laser system | John P. Fallon, Richard L. Sandstrom, William N. Partlo, Alexander I. Ershov, Toshihiko Ishihara +4 more | 2011-08-02 |
| 7852889 | Active spectral control of DUV light source | Wayne J. Dunstan, Rajasekhar Rao, Fedor Trintchouk | 2010-12-14 |
| 7835414 | Laser gas injection system | Wayne J. Dunstan, Kevin M. O'Brien, Herve A. Besaucele, Aravind Ratnam | 2010-11-16 |
| 7830942 | Ultraviolet laser light source pulse energy control system | Wayne J. Dunstan | 2010-11-09 |
| 7830934 | Multi-chamber gas discharge laser bandwidth control through discharge timing | William N. Partlo, Daniel J. W. Brown | 2010-11-09 |
| 7822084 | Method and apparatus for stabilizing and tuning the bandwidth of laser light | Kevin M. O'Brien | 2010-10-26 |
| 7756171 | Method and apparatus for laser control in a two chamber gas discharge laser | — | 2010-07-13 |
| 7751453 | Method and apparatus for laser control in a two chamber gas discharge laser | — | 2010-07-06 |
| 7741639 | Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control | Herve A. Besaucele, Wayne J. Dunstan, Toshihiko Ishihara, Fedor Trintchouk | 2010-06-22 |
| 7720120 | Method and apparatus for laser control in a two chamber gas discharge laser | — | 2010-05-18 |
| 7643528 | Immersion lithography laser light source with pulse stretcher | William N. Partlo, Alexander I. Ershov, German E. Rylov, Igor V. Fomenkov, Daniel J. W. Brown +11 more | 2010-01-05 |
| 7643522 | Method and apparatus for gas discharge laser bandwidth and center wavelength control | Fedor Trintchouk | 2010-01-05 |
| 7596164 | Control system for a two chamber gas discharge laser | John P. Fallon, John Allen Rule, Jacob Lipcon, William N. Partlo, Alexander I. Ershov +4 more | 2009-09-29 |
| 7382815 | Laser spectral engineering for lithographic process | Ronald Spangler, Jacob Lipcon, John Allen Rule, Armen Kroyan, Ivan Lalovic +2 more | 2008-06-03 |
| 7298770 | Laser spectral engineering for lithographic process | Ronald Spangler, Jacob Lipcon, John Allen Rule, Armen Kroyan, Ivan Lalovic +2 more | 2007-11-20 |
| 7164144 | EUV light source | William N. Partlo, Norbert Bowering, Alexander I. Ershov, Igor V. Fomenkov, David W. Myers +2 more | 2007-01-16 |
| 7158840 | Tuning control parameters of vibration reduction and motion control systems for fabrication equipment and robotic systems | — | 2007-01-02 |
| 7116695 | Laser output light pulse beam parameter transient correction system | — | 2006-10-03 |
| 7087914 | High repetition rate laser produced plasma EUV light source | Robert P. Akins, Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov, John M. Algots +2 more | 2006-08-08 |
| 7079564 | Control system for a two chamber gas discharge laser | John P. Fallon, John Allen Rule, Jacob Lipcon, William N. Partlo, Alexander I. Ershov +4 more | 2006-07-18 |
| 7039086 | Control system for a two chamber gas discharge laser | John P. Fallon, John Allen Rule, Jacob Lipcon, Richard L. Sandstrom, William N. Partlo +5 more | 2006-05-02 |
| 6959484 | System for vibration control | Ronald Spangler, Emanuele Bianchini, Baruch Pletner, Betsy Marsh | 2005-11-01 |